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Updated: May 10, 2025

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基于液晶空间光调节器的共聚焦显微镜的三维聚焦测量方法

Yupeng Li1, Yifan Li1

  • 1College of Metrology Measurement and Instrument, China Jiliang University, Hangzhou 310018, China.

Sensors (Basel, Switzerland)
|April 26, 2025
PubMed
概括

本研究引入了一种使用液晶空间光调节器 (LC-SLM) 进行先进微纳米测量的新型共聚焦测量方法. 该系统实现了高精度的3D聚焦和空间定位,以提高微纳米制造的速度.

关键词:
同焦点显微镜的共焦显微镜.液晶空间光调节器的空间光调节器三维聚焦技术是三维聚焦技术.

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