使用激光追踪器和平面镜校准角度定位错误的方法
Bala Muralikrishnan1, Meghan Shilling1, Vincent Lee1
1Sensor Science Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.
Sensors (Basel, Switzerland)
|April 28, 2025
概括
本研究介绍了一种基于镜子的激光追踪器方法,用于精确校准旋转阶段的角度误差. 该技术实现了亚弧秒的精度,优于传统的直接测量方法,以改善角度定位.
科学领域:
- 计量学 计量学 计量学
- 光学工程是指光学工程.
- 机械工程 机械工程
背景情况:
- 精确的角度定位对于精密机械至关重要.
- 现有的旋转阶段校准方法的准确性和范围可能受到限制.
- 激光追踪器提供高精度,但需要强大的校准技术.
研究的目的:
- 开发和验证一种新的基于镜子的方法,用于校准旋转阶段的角度定位误差.
- 将拟议方法的性能与直接测量方法进行比较.
- 量化新校准技术的不确定性和准确性.
主要方法:
- 使用激光追踪器 (LT) 和安装在旋转台上的平面镜子.
- 通过对静止的球形反射器 (SMR) 进行两次LT测量来确定镜子的正常向量.
- 使用固定登记巢集成来自多个LT站的数据,以实现全方位360°覆盖.
主要成果:
- 基于镜子的方法实现了 ±0.5 弧秒的角度定位误差.
- 这明显小于直接接近的 ±1.5 弧秒误差.
- 模拟估计基于镜子的方法的不确定性为0.4弧秒 (k=2).
结论:
- 开发的基于镜子的激光追踪方法为校准旋转阶段角误差提供了卓越的准确性.
- 该技术比直接测量方法更精确,有可能进一步降低不确定性.
- 激光追踪器和球形反射器的最佳位置提高了测量确定性.
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