Jove
Visualize
联系我们
JoVE
x logofacebook logolinkedin logoyoutube logo
关于 JoVE
概览领导团队博客JoVE 帮助中心
作者
出版流程编辑委员会范围与政策同行评审常见问题投稿
图书馆员
用户评价订阅访问资源图书馆顾问委员会常见问题
研究
JoVE JournalMethods CollectionsJoVE Encyclopedia of Experiments存档
教育
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab Manual教师资源中心教师网站
使用条款与条件
隐私政策
政策

相关概念视频

您也可能阅读

相关文章

通过共同作者、期刊和引用图与本文相关的文章。

排序
Same author

Aspirin prevents postoperative peritoneal adhesions by inhibiting the TGF‑β1/Smad signaling pathway in rats.

Molecular medicine reports·2026
Same author

Advanced Degradation and Remediation Strategies for Per- and Polyfluoroalkyl Substances (PFASs): Challenges and Future Perspectives.

Toxics·2026
Same author

HDAC2-mediated H3K27ac Governs ZFP42 transcription and autophagy in granulosa cells of pigs.

Life sciences·2026
Same author

Application of a modified Peyton's four-step approach in clinical skills training for residents: a randomized controlled trial.

BMC medical education·2026
Same author

From spheres to bottles: carbon-source-directed general synthesis of hollow carbon superstructures via dual templates for solar thermochemical heat storage.

Journal of colloid and interface science·2026
Same author

Light quality-regulated anthocyanin biosynthesis in Lilium leichtlinii subsp. maximowiczii bulbs: A multi-omics perspective.

PloS one·2026
Same journal

Intrinsic Superconducting Gap in Bilayer KCa<sub>2</sub>Fe<sub>4</sub>As<sub>4</sub>F<sub>2</sub> and Decoupled Monolayer FeAs.

Nano letters·2026
Same journal

Programmable Hydrogen-Assisted Chemical Vapor Deposition Growth and Bipolar Transport in Two-Dimensional MoO<sub>2</sub> Nanoflakes.

Nano letters·2026
Same journal

A Curvature-Modulated Strategy for Single-Atom Catalysts toward Reciprocal Regulation in Li-S Batteries.

Nano letters·2026
Same journal

Vacuum Pyrolysis Engineered CoSb/C Scaffold for Sodium Metal Anodes with Sodiophilic and Superionic Interphase.

Nano letters·2026
Same journal

Hexagonal SiGe Quantum Dots in Nanowires.

Nano letters·2026
Same journal

Monolithic Axial InGaAs Quantum Dot Emitters in GaAs-Based Nanowires via Sb-Mediated Facet Engineering.

Nano letters·2026
查看所有相关文章

相关实验视频

Updated: May 22, 2025

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
10:18

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Published on: January 27, 2017

14.3K

法拉第石版画法拉第石版画法拉第

Yuxiang Yin1, Bingyan Liu1, Yanru Chen2

  • 1School of Physical Science and Technology, ShanghaiTech University, 393 Middle Huaxia Road, Shanghai 201210, China.

Nano letters
|April 28, 2025
PubMed
概括
此摘要是机器生成的。

法拉第光刻法 (FL) 为纳米级3D打印和纳米制造提供了一种新的解决方案,以高精度实现35nm特征. 这种简单的,多功能技术克服了半导体纳米制造传统光刻法的局限性.

关键词:
3D纳米打印技术的使用蚀刻 蚀刻 蚀刻 是一种方法.混合纳米制造的混合纳米制造.金属纳米结构的金属纳米结构.模式 模式 模式 模式 模式

更多相关视频

Simple Lithography-Free Single Cell Micropatterning using Laser-Cut Stencils
08:59

Simple Lithography-Free Single Cell Micropatterning using Laser-Cut Stencils

Published on: April 3, 2020

7.4K
Fabrication and Operation of a Nano-Optical Conveyor Belt
11:10

Fabrication and Operation of a Nano-Optical Conveyor Belt

Published on: August 26, 2015

11.5K

相关实验视频

Last Updated: May 22, 2025

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
10:18

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Published on: January 27, 2017

14.3K
Simple Lithography-Free Single Cell Micropatterning using Laser-Cut Stencils
08:59

Simple Lithography-Free Single Cell Micropatterning using Laser-Cut Stencils

Published on: April 3, 2020

7.4K
Fabrication and Operation of a Nano-Optical Conveyor Belt
11:10

Fabrication and Operation of a Nano-Optical Conveyor Belt

Published on: August 26, 2015

11.5K

科学领域:

  • 纳米技术纳米技术
  • 半导体制造业 半导体制造业
  • 先进的石版印刷技术 (Advanced Lithography) 是一个非常先进的技术.

背景情况:

  • 由于集成电路中的临界维度 (CD) 缩放,传统的光刻版面临着基本的分辨率限制.
  • 替代模式方法,如自我调整的双重模式和定向自组装引入了过程复杂性和制造变化.

研究的目的:

  • 开发一种超越现有方法局限性的新型光刻技术.
  • 为了实现半导体应用的高分辨率,精确和多功能纳米尺度图案.

主要方法:

  • 法拉第光刻 (FL) 的发展,一种混合方法,将纳米尺度3D打印与传统纳米制造相结合.
  • 展示FL在各种基板上进行2D/3D图案设计的能力,不论导电性或透明度如何.

主要成果:

  • 以原子尺度的精度 (线边粗度为0.95 nm) 实现了显著的35nm特征.
  • 展示了优秀的本地CD统一性和流程简单性.
  • 展示了材料的多功能性和与各种基板的兼容性,无需额外的工艺步骤.

结论:

  • 法拉第光刻法 (FL) 为半导体纳米制造提供了一种简单,高分辨率和多功能图案解决方案.
  • FL补充了当前的模式技术,并有可能推动该领域的创新.
  • 该技术能够模拟多种材料,使其成为纳米制造的重大进步.