通过兴奋剂来控制溶液处理的ATO薄膜晶体管中的电特性
Bu Kyeong Hwang1, Ji Hyang An1, Bo Ram Lee1
1Nano Convergence Materials Center, Korea Institute of Ceramic Engineering and Technology (KICET) Jinju 52851 Republic of Korea soowon.heo@kicet.re.kr.
RSC advances
|April 29, 2025
概括
的兴奋剂将高导电性氧化物 (ATO) 转化为一个切换半导体. 氧化 (AGTO) 薄膜晶体管表现出增强的移动性和稳定性,使低成本应用成为可能.
科学领域:
- 材料科学 材料科学 材料科学
- 半导体物理 半导体物理
- 设备工程 设备工程
背景情况:
- 溶液处理的反氧化 (ATO) 薄膜通常具有高导电性,阻碍其在薄膜晶体管 (TFT) 中的使用.
- 在氧化物半导体中实现受控的电特性对于先进的电子应用至关重要.
研究的目的:
- 研究 (Ga) 兴奋剂对溶液处理ATO电气特性的影响.
- 为TFTs开发一种稳定且功能性的氧化物半导体材料.
主要方法:
- (Ga) 在不同度中被合成抗氧化-锡氧化物 (ATO).
- 由此产生的反--锡氧化物 (AGTO) 薄膜晶体管 (TFT) 的电气性能被描述.
- 在偏差应激条件下评估设备性能.
主要成果:
- 加兴奋剂成功诱导了ATO膜的切换行为,产生了反--锡氧化物 (AGTO) TFTs.
- 一个20%的Ga-doped的AGTO TFT实现了1.12cmV-1s-1的和流动性,以及4.68×104的开/关电流比.
- 在偏差应力下,AGTO TFT表现出良好的稳定性,具有轻微的门电压变化.
结论:
- 兴奋剂有效地降低了ATO膜中的载体度和与氧相关的缺陷.
- 加抑制结晶,导致高度均的AGTO膜.
- 溶液加工的AGTO是一种有前途的氧化物半导体,用于具有成本效益的,大面积的电子应用.
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