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Updated: Aug 3, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
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Published on: April 13, 2016

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高集成的多重显微镜系统用于集成电路故障分析

Haotian Li, Junliang Liu, Cheng Fei

    Optics letters
    |May 1, 2025
    PubMed
    概括

    本研究介绍了用于非破坏性半导体缺陷检测的先进光学复合系统. 集成系统快速识别集成电路故障,使得精确的根源原因分析.

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    The early pioneers of microscopy opened a window into the invisible world of microorganisms. In 1830, Joseph Jackson Lister created an essentially modern light microscope. The 20th century saw the development of microscopes that leveraged nonvisible light, such as fluorescence microscopy that uses an ultraviolet light source and electron microscopy that uses short-wavelength electron beams. These advances significantly improved magnification, image resolution, and contrast. By comparison, the...
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