相关实验视频

Updated: May 22, 2025

Nitroreductase/Metronidazole-Mediated Ablation and a MATLAB Platform RpEGEN for Studying Regeneration of the Zebrafish Retinal Pigment Epithelium

Nitroreductase/Metronidazole-Mediated Ablation and a MATLAB Platform RpEGEN for Studying Regeneration of the Zebrafish Retinal Pigment Epithelium

Published on: March 2, 2022

基于ZrO的多层堆与Al,Y或La间层,用于SiC电源设备

Sandra Krause¹, Aleksey Mikhaylov², Uwe Schroeder³

¹TU Dresden, 01062 Dresden, Germany.

ACS applied materials & interfaces

|May 2, 2025

概括

将氧化 (Al2O3) 介层整合到氧化 (ZrO2) 薄膜中,可以显著减少碳化 (SiC) 电源设备的泄漏电流. 这种Al2O3-ZrO2堆实现了高分解场和改善的介电性质.

科学领域:

材料科学材料科学材料科学
电气工程电气工程
半导体物理半导体物理

背景情况:

二氧化 (ZrO2) 是一种高k介电材料,适用于碳化 (SiC) 电源设备.
然而,ZrO2在较厚层中受到低分解场和高泄漏电流的影响,限制了其应用.
有效的介电层对于提高SiC电源设备的性能和可靠性至关重要.

研究的目的:

为了抑制SiC电源设备的ZrO2膜中的泄漏电流.
研究Al2O3,Y2O3和La2O3中间层对ZrO2介电性质的影响.
为了优化ZrO2基堆的介电性能,用于高压应用.

主要方法:

制造ZrO2薄膜与Al2O3,Y2O3或La2O3.3的薄间层相结合.
电气特性,包括泄漏电流测量和故障场的确定.
使用像X射线衍射 (XRD) 和传输电子显微镜 (TEM) 等技术分析薄膜结构和热稳定性.
电容-电压 (C-V) 测量以评估电荷捕获效应.

主要成果:

整合Al2O3,Y2O3或La2O3间层显著降低了ZrO2膜中的电荷载体传输和泄漏电流.
Al2O3中间层显示出最显著的改善,减少了两个数量级的泄漏电流.
优化的Al2O3-ZrO2堆实现了7.4 MV/cm的高分解场和13.3的介电常数.
纳米层结构的无形性使得结晶温度提高到750°C.
电容-电压测量表明没有额外的电荷捕获,而优化沉积相比纯ZrO2.2,减少了50%的捕获.

结论:

薄的Al2O3介层有效地抑制了泄漏电流,并增强了SiC电源设备中ZrO2介电物的分解场.
纳米层结构的无形性质和改善的热稳定性是其卓越性能的关键.
这种方法为开发可靠的高k介电材料,用于先进的SiC功率电子产品提供了一个有希望的途径.
优化的堆表现出出色的介电特性,没有有害的电荷捕获效应.

关键词:

介电物质是一种介电物质.高清高清高清高清多层次的多层次的纳米化物是一种纳米化物.碳化是碳化的重要组成部分.

更多相关视频

ROS Live Cell Imaging During Neuronal Development

ROS Live Cell Imaging During Neuronal Development

Published on: February 9, 2021

Monitoring On-Target Signaling Responses in Larval Zebrafish - Z-REX Unmasks Precise Mechanisms of Electrophilic Drugs and Metabolites

Monitoring On-Target Signaling Responses in Larval Zebrafish - Z-REX Unmasks Precise Mechanisms of Electrophilic Drugs and Metabolites

Published on: June 2, 2023

相关概念视频

Pozzolans

Pozzolans

Pozzolans are siliceous or aluminous materials blended with Portland cement. They interact with the calcium hydroxide produced during the hydration of Portland cement and contribute to improved strength and durability of concrete. The pozzolanic activity, a measure of a pozzolan's effectiveness, is typically assessed using the strength activity index, as defined in ASTM C 618-93, which calculates the ratio of the compressive strength of cement mixtures with and without pozzolan.
Fly ash is...

Ribozymes

Ribozymes

RACE - Rapid Amplification of cDNA Ends

RACE - Rapid Amplification of cDNA Ends

Rapid Amplification of cDNA Ends, or RACE, is one of the most effective methods to obtain a full-length cDNA from an mRNA sequence between a known internal region to the unknown sequence at the 5’ or 3’ end. The unknown region is cloned in the cDNA by a gene-specific primer that binds the known end, and a hybrid primer that attaches a predefined anchor sequence to the unknown end of the cDNA. The sequence in between is amplified by PCR with an anchor primer and a gene-specific...