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Updated: May 12, 2025

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在4H-SiC沟MOS电容器中研究ZrO2门介电器与薄SiO2界面层

Qimin Huang1,2,3, Yunduo Guo1,2,3, Anfeng Wang1,2,3

  • 1Institute of Wide Bandgap Semiconductors and Future Lighting, Academy for Engineering & Technology, Fudan University, Shanghai 200433, China.

Materials (Basel, Switzerland)
|May 7, 2025
PubMed
概括

优化碳化 (SiC) MOSFETs,这项研究使用SiO2/ZrO2堆增强了门介电. 新结构改善了故障电场,并减少了泄漏电流,以提高设备性能.

关键词:
这就是ALD.MOS电容器的电容器是什么在SiO2/ZrO2中,这就是ZrO2的含量.门介电器 门介电器沟结构是沟的结构.

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