钻石丝磨损及其对单晶切割表面质量的影响
Jinguang Du1,2, Yu Wu1,2, Zhen Zhang3,4
1Henan Provincial Key Laboratory of Intelligent Manufacturing of Mechanical Equipment, Zhengzhou University of Light Industry, Zhengzhou 450002, China.
Materials (Basel, Switzerland)
|May 7, 2025
概括
钻石丝 (DWS) 机械加工单晶表明,钻石丝磨损会影响晶圆质量. 在稳定的磨损期间发生最佳切片,而早期和晚期的磨损期产生较差的结果.
科学领域:
- 材料科学 材料科学 材料科学
- 制造业 工程 制造工程
- 半导体加工 半导体加工
背景情况:
- 单晶是半导体行业的一个关键材料.
- 钻石丝 (DWS) 是晶圆加工的一个关键工艺.
- 钻石线磨损显著影响加工晶片的精度和质量.
研究的目的:
- 调查钻石线磨损对单晶晶片加工质量的影响.
- 分析钻石线磨损对总厚度变化 (TTV) 和表面质量的影响.
- 探索加工参数对钻石线磨损率的影响.
主要方法:
- 进行了单因素实验,以检查钻石线磨损.
- 研究的加工参数包括线速度,料速度和工件厚度.
- 在不同的钻石线磨损条件下评估了晶圆TTV和表面质量.
主要成果:
- 钻石线的磨损率在初始和最终的磨损阶段呈现出更高的值,与晶圆质量较差相关.
- 确定了稳定的磨损期,其特点是一致的磨损率和高质量的晶圆表面.
- 增加的线速度减少了钻石线的磨损量,而更高的料速度和工件厚度增加了它.
- 电线速度和料速率的同时比例增加使得钻石线的磨损保持在相对恒定的水平.
结论:
- 钻石线磨损显著影响单晶晶片的质量,不同的磨损阶段影响加工结果.
- 优化加工参数,如线速度和料率,对于管理钻石线磨损和确保高质量的晶圆生产至关重要.
- 了解磨损阶段和加工参数之间的关系,可以更好地控制DWS过程.
相关概念视频
Imperfections in Crystal Structure: Point, Line and Plane Defects
A perfect crystal, in theory, has a uniform structure with the same unit cell and lattice points throughout. However, any deviation from this periodic arrangement is known as an imperfection or defect. These defects can be categorized into three types: point, line, and plane defects.Point defects occur when there is a deviation from the ideal due to missing atoms, displaced atoms, or additional atoms. These imperfections might occur due to imperfect packing during crystallization or because of...
Quarrying of Stone
Quarrying is the process of extracting stone from a quarry, where specialized techniques are employed to remove large blocks of stone safely and efficiently. This process can involve controlled explosions or more precision-oriented methods such as cutting and drilling.
One common method involves using a diamond belt saw to cut large blocks from the quarry face. These blocks can be about 50 feet long and 12 feet high. After the initial vertical cut, drilling is performed at the base of the block.
One common method involves using a diamond belt saw to cut large blocks from the quarry face. These blocks can be about 50 feet long and 12 feet high. After the initial vertical cut, drilling is performed at the base of the block.
Toughness and Hardness of Aggregate
Toughness and hardness are critical properties of aggregate materials used in concrete, particularly on pavement surfaces and industrial flooring subjected to heavy loads. Toughness is defined as the aggregate's resistance to failure by impact and is measured by the aggregate impact value (AIV). For this, the aggregate impact value test is performed, wherein the impact is delivered by a standard hammer, which falls freely under its own weight onto the aggregates. The aggregates fragment in the...
Abrasion Resistance of Concrete
Abrasion resistance is an essential characteristic of concrete that determines its durability and longevity under various wear conditions. Concrete surfaces are vulnerable to different types of abrasion. For instance, surfaces may wear down due to the constant movement of vehicles or be eroded by solids carried in water, as seen in concrete canal linings. Specific tests are conducted to measure the abrasion resistance of concrete.
One such test is the revolving disc test, where three plates...
One such test is the revolving disc test, where three plates...


