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一种铜蚀刻,具有宽的工艺窗口,长时间的洗寿命和高稳定性,用于薄膜晶体管液晶显示应用

Bing Zhang1, Yafen Yang1,2, David Wei Zhang1,2

  • 1School of Microelectronics, Fudan University, Shanghai 200433, China.

Materials (Basel, Switzerland)
|May 7, 2025
PubMed
概括

一种新的铜蚀刻剂可以为先进的薄膜晶体管液晶显示器 (TFT-LCD) 提供稳定,高精度的蚀刻. 这种优化的配方延长了浴寿命,并改善了下一代显示器制造的工艺控制.

关键词:
在TFT-LCD制造业.增强浴室生活 增强浴室生活铜离子负荷较大的铜离子负荷.铜-烯酸蚀刻剂 铜-烯酸蚀刻剂过程窗口优化过程窗口优化

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相关概念视频

Electrodeposition01:08

Electrodeposition

Electrodeposition is a technique used to separate an analyte from interferents by electrochemical processes. Here, the analyte is a metal ion that can be deposited on an electrode immersed in the sample solution. The electrochemical setup consists of an anode and a cathode. When an electric current is applied to the setup, oxidation occurs at the anode. At the cathode, which consists of a large metal surface, metal ions undergo reduction and deposit onto the surface.
Electrodeposition can...