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Updated: Apr 28, 2026

Fabrication of Spatially Confined Complex Oxides
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来自SrTiO3基质批量微加工的氧化物膜

Nicola Manca1,2, Alejandro E Plaza1,2, Leonélio Cichetto1

  • 1CNR-SPIN, C.so F. M. Perrone, 24, Genova, 16152, Italy.

Advanced science (Weinheim, Baden-Wurttemberg, Germany)
|May 9, 2025
PubMed
概括

本研究介绍了一种批量微加工方法,用于创建悬浮复杂氧化物微结构. 这种技术可以完全访问设备,克服了先进氧化物材料表面微加工的局限性.

关键词:
在 SrTiO3 蚀刻时进行蚀.大量微加工-微加工.氧化物 MEMS 的使用.氧化物膜 氧化物膜氧化物微力学 氧化物微力学

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