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基于多束激光干扰仪的空间精度补偿方法的开发

Lihua Lei^1,2, Changjian Sun³, Zhangning Xie^1,2

¹Shanghai Institute of Measurement and Testing Technology, Shanghai, 201203, China.

Scientific reports

|May 14, 2025

概括

一个新的多束激光干扰仪系统同时测量CNC机床的6度自由度误差. 这种空间误差补偿显著提高了机床的精度和定位精度.

科学领域:

计量学计量学计量学
机械工程机械工程
光学仪器仪器仪器仪器仪器仪器仪器仪器仪器仪器仪器仪器

背景情况:

机床在多个自由度中表现出错误,影响精度.
精确测量和补偿这些错误对于先进制造至关重要.

研究的目的:

开发一个数学模型用于机床的空间错误.
提出一个多束激光干扰仪,用于同时测量六度自由度误差.
为数控机器创建一个空间误差测量和精度补偿系统.

主要方法:

建立了运动轴误差的数学模型,并结合了12行方法校正.
设计了一个多束激光干扰仪,使用四个激光进行多功能参数测量.
基于干扰仪数据实现了一个基于空间精度补偿的软件算法.
通过在不同空间坐标上的测量轴进行验证的角误差校正.

主要成果:

实现了对六个自由度的同时测量误差.
在线性定位精度 (96%),水平直度 (89%) 和垂直直度 (55%) 中显著改善.
平均和最大定位偏差分别减少了88%和91%.

结论:

拟议的多束激光干扰仪和空间误差补偿系统有效地提高了CNC机床的精度.
该系统提供了一个可行的解决方案,通过先进的计量技术实现高精度制造.
实验验证证证实了各种准确度指标的大幅改善.

关键词:

准确度准确度准确度准确度准确度错误补偿错误补偿错误补偿错误补偿激光干扰仪的激光干扰仪.空间定位是指空间定位.

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