由 (La,Sr) MnO3单晶薄膜制成的磁性床共振器
Nicola Manca1, Dhavalkumar Mungpara2, Leonélio Cichetto1
1CNR-SPIN, C.so F.M. Perrone, 24, Genova 16152, Italy.
ACS sensors
|June 6, 2025
概括
研究人员开发了使用 (La0.7,Sr0.3) MnO3 (LSMO) 薄膜的新型磁共振器. 这些单步制造的设备为先进的磁场传感应用提供了高性能.
科学领域:
- 材料科学 材料科学 材料科学
- 凝聚物质物理学 凝聚物质物理学
- 纳米技术纳米技术
背景情况:
- 微电机共振器正在探索用于磁场传感.
- 集成磁性材料与半导体是复杂的.
- 需要一种使用单一磁性材料的新方法.
研究的目的:
- 开发一种新型的微型电机共振器.
- 使用 (La0.7,Sr0.3) MnO3 (LSMO) 作为结构材料和磁性材料.
- 为了创建高性能磁场传感器.
主要方法:
- 从LSMO薄膜制造悬浮床共振器,只需一个步骤.
- 响应器质量因子 (Q) 和响应频率 (f) 的表征.
- 使用SQUID磁力测量和磁力显微镜进行磁性特性分析.
主要成果:
- 达到高达60k的质量因子和1010Hz的f·Q产品.
- 证明了室温和磁化功率为240kA/m.
- 观察到平面内磁域,其强迫力为2.5mT.
结论:
- 基于LSMO的共振器可以在单个步骤中高效地制造.
- 这些共振器具有出色的机械和磁性性能.
- 大量的磁相互作用体积使它们成为高灵敏度磁场传感器的前景.
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