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    科学领域:

    • 光学工程是指光学工程.
    • 计量学 计量学 计量学
    • 纳米技术 纳米技术

    背景情况:

    • 传统的表面编码器在测量外平面位移方面存在局限性,特别是在环境干扰方面.
    • 迈克尔森基于干扰的方法在表面编码器中与Z轴精度作斗争.

    研究的目的:

    • 提出一个近常见的光学路径双轴表面编码器设计.
    • 为了提高位移测量的稳定性和准确性,特别是对于平面外 (Z轴) 运动.

    主要方法:

    • 采用一种新的三层网格 (TLGs) 干扰方法.
    • 使用近乎常见的光学路径设计,以最大限度地减少对环境的影响.
    • 在多个格层中实施光束分裂和衍射策略.

    主要成果:

    • 该TLGs干扰方法可以同时在平面内和平面外进行广泛的移位测量.
    • 几乎常见的光学路径设计显著提高了对环境干扰的稳定性.
    • 一个原型证明了提议的TLG干扰方法的有效性,用于准确的双轴位移跟踪.

    结论:

    • 提议的TLG干扰方法在表面编码器技术中提供了显著的进步.
    • 这种设计为广泛的两轴位移测量提供了强大而准确的解决方案.
    • 该方法克服了传统编码器在平面外测量的局限性.