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Updated: Jun 27, 2026

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局部缺陷对光学元件散射光的影响:测量和分析

Adrien Bolliand, Michel Lequime, Claude Amra

|June 14, 2025

概括

一种新的空间和角度分辨散射仪设备 (SPARSE) 可以识别和量化光学表面缺陷,如粗,局部缺陷和划痕. 这项技术有助于确定光学系统中的性能损失来源.

科学领域:

光学工程是指光学工程.
计量学计量学是一门学科.
表面科学是一门学科.

背景情况:

光学表面缺陷和污染物显著降低了系统性能.
准确地描述这些缺陷对于质量控制和性能优化至关重要.

研究的目的:

介绍和展示一个新的空间和角度分辨散射仪设备 (SPARSE) 的功能.
为了证明不同光学表面缺陷的定量分析.

主要方法:

使用空间和角度分辨率散射测量设备 (SPARSE) 进行测量.
在校准样本和三个不同的缺陷样本上进行散射测量.
分析了空间解析的角度解析散射 (ARS) 数据.

主要成果:

证明了SPARSE能够区分各种表面缺陷的能力.
从粗度,局部缺陷和划痕独立量化散射光的贡献.
展示了可以从ARS测量中获得的丰富信息内容.

结论:

SPARSE是一个能够进行详细的光学表面缺陷分析的工具.
不同类型的缺陷的独立量化是可以实现的.
这项技术可以识别光学元件中性能损失的关键来源.

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