概括
这项研究引入了一种新的方法,用于使用触角弧长 (TAAL) 曲线进行曲线面罩光学近距离校正 (OPC). 基于TAAL的小选择与定向移动 (SSDM) 方法简化了控制点操作,并减少了模式错误 (PAE).
科学领域:
- 半导体制造业 半导体制造业
- 摄影石版印刷 (photolithography) 是一种摄影方式.
- 计算式 lithography 的使用方法.
背景情况:
- 曲线面罩为先进的半导体节点提供了卓越的光刻图像质量.
- 目前用于曲线面罩的光学近距离校正 (OPC) 方法涉及复杂的算法,并且经常产生低于最佳的打印图像保真度.
- 控制点的选择和操纵是曲线面具OPC的关键但具有挑战性的步骤.
研究的目的:
- 开发一种简化,更有效的曲线面罩光学近距离校正 (OPC) 方法.
- 为了减少计算复杂性和提高石版印刷图像的真实性.
- 引入OPC中控制点选择和移动的新方法.
主要方法:
- 使用一维触角弧长 (TAAL) 曲线表示2D曲线面罩边界.
- 介绍基于TAAL曲线表示的方向运动 (SSDM) 小选择方法.
- 通过模拟,将基于TAAL的SSDM方法与统一选择和随机移动方法进行比较.
主要成果:
- TAAL曲线简化了控制点的选择和运动方向的确定.
- 与现有的OPC方法相比,基于TAAL的SSDM方法显著降低了计算复杂性.
- 模拟结果显示,使用基于TAAL的SSDM方法,模式错误 (PAE) 显著减少.
结论:
- 在TAAL曲线提供了一种有效的方式来表示和操纵OPC的曲线面具边界.
- 基于TAAL的SSDM方法提供了一个有前途的解决方案,用于提高先进光刻的精度和效率.
- 这种方法减轻了与当前OPC技术中复杂算法和低于最佳的打印图像保真度相关的挑战.
相关概念视频
01:21Linear Approximation in Time Domain
72
Nonlinear systems often require sophisticated approaches for accurate modeling and analysis, with state-space representation being particularly effective. This method is especially useful for systems where variables and parameters vary with time or operating conditions, such as in a simple pendulum or a translational mechanical system with nonlinear springs.
For a simple pendulum with a mass evenly distributed along its length and the center of mass located at half the pendulum's length,...
For a simple pendulum with a mass evenly distributed along its length and the center of mass located at half the pendulum's length,...
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01:19Introduction to Horizontal Curves
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Horizontal curves are essential in highway and railroad design, ensuring smooth and safe transitions between straight path segments, or tangents. These curves allow vehicles to maintain speed without abrupt changes, minimizing accidents and improving travel efficiency.A horizontal curve is typically defined by its geometric relationship to two tangents that meet at an intersection point (P.I.), where a simple curve is introduced to connect them. The back tangent refers to the initial tangent...
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01:26Linear Approximation in Frequency Domain
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Linear systems are characterized by two main properties: superposition and homogeneity. Superposition allows the response to multiple inputs to be the sum of the responses to each individual input. Homogeneity ensures that scaling an input by a scalar results in the response being scaled by the same scalar.
In contrast, nonlinear systems do not inherently possess these properties. However, for small deviations around an operating point, a nonlinear system can often be approximated as linear....
In contrast, nonlinear systems do not inherently possess these properties. However, for small deviations around an operating point, a nonlinear system can often be approximated as linear....
88
01:17Curve Equations
27
Curves are essential geometric elements characterized by tangent distance, chord length, middle ordinate, and total arc length. These measurements are crucial in understanding a curve's geometric and spatial properties and are defined by the relationship between its radius and its central angle.The tangent distance (T) refers to the straight-line measurement from the intersection point of two tangents to either the start or end of the curve. This distance is influenced by the curve's radius (R)...
27
01:03Horizontal Curve: Problem Solving
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A horizontal curve is characterized by its radius, intersection angle, and stationing of key points. In this case, the radius is 400 meters, and the angle of intersection is 30 degrees, with the station of the point of curvature (P.C.) at 0 + 150 meters. The goal is to determine the station values at the point of intersection (P.I.), point of tangency (P.T.), and midpoint of the curve, as well as the length of the long chord.The process begins with calculating the tangent distance (T) and the...
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