跨周期亚尼奎斯特采样方法用于高效的3D表面造型在低连贯性扫描干扰度
Optics express
|June 14, 2025
概括
一种新的跨周期亚尼奎斯特采样方法提高了低相干扫描干扰测量 (LCSI) 的效率. 这种技术可以实现更高的精度和更好的粗度测量,采样间隔比尼奎斯特极限大得多.
科学领域:
- 光学计量学 在光学计量学
- 表面形测量仪表面形测量仪
- 干涉测量是干涉测量的方法.
背景情况:
- 低相干扫描干扰测量 (LCSI) 是一种精确的3D表面造型测量技术.
- 尼奎斯特采样标准通过规定一个小的采样间隔来限制LCSI测量效率.
- 保持信号特征需要遵守严格的采样间隔,阻碍速度.
研究的目的:
- 为LCSI提出一种新的跨期亚尼奎斯特采样方法.
- 为了提高测量效率而不会损害信号完整性.
- 为了提高3D表面形状测量的精度和分辨率.
主要方法:
- 开发了一个跨时期的亚尼奎斯特采样策略.
- 根据尼奎斯特步骤大小和整个波长周期定义了一个特定的采样间隔.
- 保持了干涉测量信号的空间和频率信息.
主要成果:
- 获得了比尼奎斯特极限大25倍的采样间隔.
- 与随机分样采样相比,测量准确度提高了90%以上.
- 改善了从0.9259μm到0.7003μm的表面粗度测量.
结论:
- 拟议的方法显著增加了LCSI采样间隔.
- 这种技术保留了基本的信号特征,空间和频率信息.
- 跨周期亚尼奎斯特采样为3D表面造型测量提供了更有效,更准确的方法.
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