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Updated: Jun 16, 2025

Sample Preparation and Experimental Design for In Situ Multi-Beam Transmission Electron Microscopy Irradiation Experiments
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Sample Preparation and Experimental Design for In Situ Multi-Beam Transmission Electron Microscopy Irradiation Experiments

Published on: June 27, 2022

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在SEM实验中测量电子束诱导的样本加热

Christina Koenig1, Alice Bastos da Silva Fanta1, Joerg R Jinschek1

  • 1National Centre for Nano Fabrication and Characterization (DTU Nanolab), Technical University of Denmark (DTU), Kgs Lyngby, Denmark.

Ultramicroscopy
|June 14, 2025
PubMed
概括

在扫描电子显微镜 (SEM) 过程中,电子束加热可能会影响样品. 这项研究量化了高达70°C的温度升高,这对于电子反射衍射 (EBSD) 分析至关重要.

关键词:
光束诱导加热的使用.欧洲银行股票监督管理局 (EBSDD)基于MEMS的供暖方式这就是SEM SEM.

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