在扫描电子显微镜中,BSE检测器的电子反射系数,材料对比度和响应函数
1Department of Physical Electronics, Faculty of Physics, Lomonosov Moscow State University, Moscow 119991, Russia.
Ultramicroscopy
|June 17, 2025
概括
在扫描电子显微镜 (SEM) 中,新的经验表达式准确地确定了电子反射散射系数 (η) 和探测器响应函数 (F). 这有助于更好地理解反向散射电子 (BSE) 信号和图像对比度在各种材料和能量之间.
科学领域:
- 材料科学 材料科学 材料科学
- 物理 物理学 物理
- 电子显微镜电子显微镜
背景情况:
- 精确的电子反散的特征对于扫描电子显微镜 (SEM) 的定量分析至关重要.
- 对于电子反散系数 (η) 和探测器响应函数 (F) 的现有模型在精度和能量范围上有局限性.
- 了解背散电子 (BSE) 信号对材料特性和SEM参数的依赖性对于图像形成至关重要.
研究的目的:
- 建立精确的实证表达式,用于电子反射系数 (η),平均反射能量系数 (ε) 和BSE检测器的响应函数 (F).
- 研究BSE信号 (IS) 与目标材料的原子数 (Z) 和初级电子能量 (EB) 的依赖性.
- 分析响应函数 (F) 在SEM中对BSE信号形成和图像对比的影响.
主要方法:
- 基于原子数 (Z) 和原电子能量 (EB) 的 η, ε 和 F 的经验表达式的开发.
- 对大量标本的广泛能量范围 (1-30 keV) 的表达式的验证.
- 用商业半导体/闪光体BSE检测器与多通道板 (MCP) 检测器获得的特性比较.
主要成果:
- 建立了新的经验表达式,在1-30 keV的能量范围内提供比以前的研究更准确的数据.
- 描述了BSE信号 (IS) 对目标物质原子号 (Z) 和SEM加速电压 (EB) 的依赖.
- 量化了响应函数 (F) 对BSE信号形成和图像对比度的影响,考虑到Z差异和EB.
结论:
- 获得的经验表达式为SEM中的BSE信号量化提供了更高的准确性.
- 这项研究更好地了解了由材料组成和SEM操作参数影响的图像对比形成.
- 这些发现适用于标准的SEM BSE检测器,并为进一步的检测器特征提供了基础.
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