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Updated: May 8, 2026

Window on a Microworld: Simple Microfluidic Systems for Studying Microbial Transport in Porous Media
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微技术中的过程开发方法和相关的过程环境

Korbinian T Metz1,2, Faruk Civelek3, André Zimmermann1,4

  • 1Faculty 7, Institute for Micro Integration (IFM), University of Stuttgart, 70569 Stuttgart, Germany.

Micromachines
|June 27, 2025
PubMed
概括

现有的微系统技术 (MST) 和微电机系统 (MEMS) 工艺开发方法不足以应对环境因素. 需要新的方法来系统地整合工艺环境要求,以提高MST制造效率和质量.

关键词:
在MEMS MEMS中使用.制造过程链的制造过程链.微系统技术技术的微系统技术.发展过程发展过程.过程环境环境过程环境

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