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Updated: Sep 18, 2025

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Video-rate Scanning Confocal Microscopy and Microendoscopy
Published on: October 20, 2011
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双轴非共振电磁驱动扫描微镜,具有大孔径
Tong Wang1,2,3, Yu Jian1,2,3, Chen Liu1,2,3
1Key Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing 400044, China.
Micromachines
|June 27, 2025
概括
这项研究引入了一种带双轴电磁驱动的大孔扫描微镜,实现了广的光学扫描角度. 低成本的设计为LiDAR和光通信应用提供了潜力.
科学领域:
- 光电学是指光电子产品.
- 微电机系统 (MEMS) 是指微电机系统.
背景情况:
- 现有的扫描微镜面临着光圈大小,扫描角度和制造成本的限制.
- 对于像LiDAR和光通信这样的应用,需要改进扫描微镜技术.
研究的目的:
- 提出和演示一个大光圈双轴电磁驱动扫描微镜.
- 为了克服当前扫描微镜设计的局限性.
主要方法:
- 设计了一个带有不钢镜子的扫描微镜和使用永久磁铁 (NdFeB 52),铁芯和铜线圈的驱动结构.
- 优化磁铁布局和线圈设计,用于双轴非共振扫描.
- 使用计算机数控 (CNC) 造制造了该设备.
主要成果:
- 实现了61.4° (x轴) 和61.1° (y轴) 的大光学扫描角度,光圈9.54mm × 10mm.
- 在非共振扫描模式下证明了双轴独立控制.
- 测量的共振频率为89 Hz (x 轴) 和63 Hz (y 轴).
结论:
- 拟议的大孔双轴扫描微镜有效地解决了现有设计的局限性.
- 低成本的CNC制造和实现的性能显示出在LiDAR,投影显示和光通信中的重大应用潜力.
- 这项工作为优化大孔径扫描微镜性能提供了一种新的方法.
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