PMUT

Jan Helmerich1, Manfred Wich1, Annika Hofmann1

  • 1Laboratory for Electrical Instrumentation and Embedded Systems, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79110 Freiburg, Germany.

Micromachines
|June 27, 2025
PubMed
概括

压电微机超声波传感器 (PMUT) 提供微米级的kHz频率,克服了批量传感器的限制. 他们的新型环电极设计允许可调节的声场和双频发射用于小型化应用.