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对CMOS-SOI-MEMS气体传感器称为GMOS的模拟电压模式读出电路的设计考虑因素

Efraim-Lavi Bukshish¹, Sharon Bar-Lev¹, Tanya Blank¹

¹Electrical and Computer Engineering Department, Technion-Israel Institute of Technology, Haifa 32000, Israel.

|June 27, 2025

概括

本研究探讨了使用CMOS-SOI-MEMS技术的低成本气体传感器. 它揭示了基于芯片的设计在气体传感应用中提供了优势,而不是单体方法,以提高气体传感应用的性能.

科学领域:

材料科学材料科学材料科学
电气工程电气工程
传感器技术传感器技术

背景情况:

现代气体传感器至关重要,推动开发使用微电子的低成本解决方案的努力.
用微电子机械系统 (MEMS) 技术在在绝缘体 (SOI) 上的辅助金属氧化物半导体 (CMOS) 传感器被考虑用于单体集成.
之前的研究重点是将传感和信号调节集成到单个芯片上,面临技术挑战.

研究的目的:

对CMOS-SOI-MEMS气体传感器的单体集成方法进行批判性审查.
通过使用电压模式读取呈现和验证一种新的单体GMOS系统设计.
为了证明基于芯片的设计对气体传感器单体设计的优势.

主要方法:

对单体CMOS-SOI-MEMS气体传感器方法的批判性审查.
使用三端GMOS晶体管的单体GMOS系统的设计和验证.
拟议的GMOS系统的电压模式读取策略.

主要成果:

基于芯片的设计对于基于CMOS-SOI-MEMS技术 (GMOS) 的气体传感器来说是有利的.
一个具有电压模式读取的单体GMOS系统成功设计和验证.
传感器和读出电路之间的冲突技术要求有利于芯片式设计.

结论:

基于芯片的架构对于先进的气体传感器来说是可取的,因为传感器和读出组件的技术需求不同.
拟议的电压模式读取设计代表了气体传感器系统的创新.
这项工作引入了综合气体传感解决方案设计的范式转变.

关键词:

在 CMOS 系统中,MEMS 是 CMOS 系统的成员.转基因生物 (GMOS) 是一种转基因生物.在MOS晶体管中使用.这就是ROIC ROIC.在TMOSOS上使用.一个小片子的碎片.气体传感器是一个气体传感器.电压模式的电压模式

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