(MEMS)

Jianqun Cheng1, Ning Xue1, Bocang Qiu1

  • 1School of Electronics and Communication Engineering, Quanzhou University of Information Engineering, Quanzhou 362000, China.

Micromachines
|June 27, 2025
PubMed
概括

微电机系统 (MEMS) 电磁执行器对于微尺度应用至关重要,提供精度和控制. 最近的创新提高了它们的性能,并扩大了它们在微机器人和微光学等领域的应用.