,

Xiuyan Cheng1, Di Liang1, Miao Jiang1

  • 1Beijing Superstring Academy of Memory Technology, Beijing 100176, China.

Micromachines
|June 27, 2025
PubMed
概括

定向自组装 (DSA) 石版使用块共聚物来创建更小,更密集的纳米尺度图案. 这种先进的技术提高了半导体设备的分辨率和统一性.

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