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基于快速模式逆转的MEMS陀螺仪自动模式匹配方法

Feng Bu¹, Bo Fan², Rui Feng³

¹School of Electronic and Information Engineering, Suzhou Vocational University, Suzhou 215104, China.

|June 27, 2025

概括

本研究介绍了微电子机械系统磁盘共振器陀螺仪 (MEMS DRGs) 的自动模式匹配技术. 该方法快速调整共振频率,提高陀螺仪的灵敏度和稳定性.

科学领域:

* 机械工程机械工程
* 电气工程电气工程
* 传感器技术 * 传感器技术

背景情况:

*由于处理错误,微电机械系统磁盘共振器陀螺仪 (MEMS DRGs) 的不对称刚性导致模式不匹配.
*这种不匹配会降低机械灵敏度和闭环尺度因子的稳定性,影响陀螺仪的性能.
*精确的模式匹配对于高精度陀螺仪操作至关重要.

研究的目的:

*为MEMS DRG开发一种自动模式匹配方法.
*通过解决模式不匹配,提高陀螺仪的灵敏度和闭环尺度因子的稳定性.
* 为了获得陀螺仪运行状态的真实共振频率,以实现精确的匹配.

主要方法:

* 实现了陀螺仪控制系统,带有闭环驱动,强力再平衡 (FTR) 和正方位错误校正.
*利用模式逆转,通过相锁循环 (PLL) 获得x和y轴的真频率.
*自动调整 x 轴调整电压以匹配两个轴的共振频率.

主要成果:

* 自动模式匹配方法仅在5秒内执行.
* 达到0.01赫兹的高频匹配精度.
* 在-20~60°C的温度范围内保持稳定的匹配,频率分割波动不超过0.005Hz.

结论:

* 提出的自动模式匹配方法有效地解决了MEMS DRG中的模式不匹配.
*该技术显著提高了陀螺仪的灵敏度和尺度因子的稳定性.
*表现出快速执行,高精度和在不同温度下强大的性能.

关键词:

MEMS 磁盘共振器陀螺仪陀螺仪快速模式逆转方式强力重新平衡的力量.模式匹配的模式匹配

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