重置脉冲宽度对基于Al2O3/TiOx的RRAM中的逐渐导电编程的影响
Hyeonseong Lim1, Wonbo Shim2, Tae-Hyeon Kim1
1Department of Semiconductor Engineering, Seoul National University of Science and Technology, Seoul 01811, Republic of Korea.
Micromachines
|June 27, 2025
概括
在多级电阻式随机存取内存 (RRAM) 中缩短重置脉冲宽度显著提高了编程线性,并减少了设备变化. 这种优化使得基于Al2O3/TiO x的RRAM设备的多层操作更加可靠和精确.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 固态物理 固态物理
背景情况:
- 电阻随机访问存储器 (RRAM) 提供高密度非易失性存储器解决方案.
- 多级导电性编程对于增加RRAM存储容量至关重要.
- 控制发光线的形成和断裂是可靠RRAM操作的关键.
研究的目的:
- 为了研究重置脉冲宽度对基于Al2O3/TiO x的RRAM中的多层导电性编程的影响.
- 确定最佳的重置脉冲宽度,以实现线性和可靠的多级编程.
- 分析脉冲宽度对周期间变化的影响.
主要方法:
- 在32x32交点阵列中制造Al2O3/TiO x RRAM设备.
- 使用增量步骤脉冲编程 (ISPP) 以不同的重置脉冲宽度 (100μs到100ns).
- 监控编程特征和读取电流,以评估导电性调和变化.
主要成果:
- 较长的重置脉冲宽度 (100μs) 导致电流突然跃升,超过了编程目标.
- 较短的重置脉冲宽度 (100 ns) 允许逐渐增加电流和精确的导电量调节.
- 减少重置脉冲宽度可以使周期间的变化减少50%以上.
结论:
- 重置脉冲宽度是控制Al2O3/TiO x RRAM中的多层编程的一个关键参数.
- 更窄的重置脉冲促进了光纤的均破坏和再生,提高了可靠性.
- 优化重置脉冲宽度为线性和稳定的多层RRAM操作提供了直接途径.
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