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Updated: Sep 17, 2025

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聚焦离子束诱导的金沉积与低温离子源的

Thomas Henning Loeber1, Bert Laegel1, Meltem Sezen2

  • 1Nano Structuring Center (NSC), Rheinland-Pfälzische Technische Universität Kaiserslautern-Landau (RPTU), P.O. Box 3049, D-67653, Kaiserslautern, Germany.

Beilstein journal of nanotechnology
|July 1, 2025
PubMed
概括

本研究比较使用 (Cs) 聚焦离子束 (FIB) 和 (Ga) FIB系统的沉积. 虽然沉积率相似,但Cs FIB产生的含量较低,电阻率更高.

关键词:
由FIB引起的存款 (FIBID)离子源是一种离子源.冷原子离子源是一种冷原子离子源.聚焦的离子束 (FIB)

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