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Zhiheng Chen1, Hongyuan Zhao2, Yueying Hou2

  • 1National Laboratory of Solid State Microstructures, Nanjing University, Nanjing, Jiangsu 210093, China; School of Materials Science and Intelligent Engineering, Nanjing University, Suzhou 215163, China.

Ultrasonics
|July 1, 2025
PubMed
概括

本研究介绍了一种人工智能驱动的超快速光声学技术,用于精确的纳米级特征化多层膜. 这种先进的方法准确地测量了薄膜厚度和晶体方向,这对于微电子和生物医学至关重要.