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多层W-doped二氧化热传感器,具有扩展的操作区域

Callum Wheeler^1,2, Yuxiao Zhu¹, Kai Sun^1,2

¹Electronics and Computer Science, Faculty of Engineering and Physical Sciences, University of Southampton, SO17 1BJ Southampton, UK.

|July 4, 2025

概括

通过原子层沉积来改进红外探测,制造了多层兴奋二氧化 (W:VO₂) 薄膜. 优化的W:VO₂博洛米特传感器在更广泛的温度范围内显示了增强的性能.

科学领域:

材料科学材料科学材料科学
凝聚物质物理学凝聚物质物理学
红外技术红外技术

背景情况:

博洛米特检测红外辐射使用具有温度电阻系数 (TCR) 的材料.
二氧化瓦纳 (VO2) 的TCR很大,但相位过渡狭窄,突然.
在VO₂中的兴奋剂 (W-兴奋剂) 修改并扩大了这种过渡温度.

研究的目的:

开发一个W:VO₂传感层,为未冷却的博洛米特提供扩展的操作温度范围.
优化多层W:VO₂结构以提高TCR性能.

主要方法:

使用原子层沉积 (ALD) 制造多层W:VO₂薄膜.
关于W:VO₂片的TCR的表征.
使用多目标遗传算法 (MOGA) 对10层W:VO₂结构进行模拟,以优化TCR及其变异.

主要成果:

制造出来的W:VO2薄膜在30°C至60°C之间显示出平均TCR为-9.5 (±3.5) %K-1
MOGA模拟优化了10层W:VO2结构,以实现最大的平均TCR差异.
优化的结构在20°C至70°C的更广泛范围内实现了平均TCR为-6.7 (±0.9) %K^{-1的平均TCR.}

结论:

由ALD制造的多层W:VO₂薄膜为未冷却的博洛米特应用提供了有前途的方法.
通过模拟优化层结构可以显著提高波罗米特在扩展温度范围的性能.
这项工作表明了W:VO₂在先进的红外传感技术中更广泛应用的潜力.

关键词:

材料科学是一种材料科学.光学是什么?光学是什么?物理物理学物理

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