相关实验视频
Updated: Sep 16, 2025

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Fabrication and Testing of Photonic Thermometers
Published on: October 24, 2018
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一个基于热传感器的高精度1 × 15红外温度测量线性阵列
Jindong Bai1,2, Wenhang Yang1,2,3, Shouzheng Zhu1,3
1Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou, China.
Communications engineering
|July 7, 2025
概括
本研究介绍了一种用于半导体制造的新型,低功耗,非接触式温度测量系统. 热传感器阵列实现了高精度,精度达到26mK.
科学领域:
- * 材料科学与工程 * 材料科学与工程
- * 电气工程 电气工程
- * 计量学 计量学
背景情况:
- *精确的温度测量在半导体制造和校准中至关重要.
- * 现有的方法往往在功耗和精度方面面临限制.
- *非接触式温度传感为敏感过程提供了优势.
研究的目的:
- * 开发一种具有低功耗和高精度的新型非接触温度测量方法.
- *使用基于热传感器的线性阵列进行表面温度测量.
- * 提高半导体应用温度监测的准确性和稳定性.
主要方法:
- * 一个由15个热传感器和一个NTC热电阻组成的线性阵列.
- * 一个带有光纤接口和运动模块的FPGA控制板.
- * 实施多参数温度补偿算法来纠正传感器错误.
主要成果:
- * 在293-303 K的范围内达到26mK的温度测量准确度.
- *被证明的最大传感器可重复性误差低于5.5mK.
- * 传感器之间显示的不均误差小于11.9mK.
- *经过6小时的测试验证的高稳定性,精度降低不超过1.5mK.
结论:
- * 拟议的热传感器阵列提供了一个高度准确和稳定的非接触式温度测量解决方案.
- * 低功耗 (<1.5 W) 使其适用于能量敏感的半导体应用.
- * 多参数补偿算法有效解决传感器不一致性,优于传统校准方法.
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