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Updated: Sep 8, 2025

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聚合物序列改变了化学放大聚类光电阻体的灵敏度和分辨率

Cameron P Adams1, Carolyn Henein2, Xiangxi Meng1

  • 1Department of Chemical Engineering, University of California, Santa Barbara, California 93106, United States.

ACS macro letters
|July 10, 2025
PubMed
概括

聚类是一种新型的聚合物,为先进的光电阻提供精确的分子控制. 它们的序列和长度对于极端紫外线光刻中的高分辨率图案至关重要,克服了传统电阻的局限性.

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