在SEM中数据效率高的4D-STEM:超越2D材料到金属材料

Ujjval Bansal1, Amit Sharma2, Barbara Putz3

  • 1Institute for Applied Materials, Karlsruhe Institute of Technology, Karlsruhe 76131, Germany.

Ultramicroscopy
|July 10, 2025
PubMed
概括

在SEM中的四维扫描传输电子显微镜 (4D-STEM) 现在提供了更快的采集和更高的角度分辨率. 这一进步使得像铜薄膜和FIB制备的铜等材料的详细成像成为可能.

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