计算自适应光学用于HAR混合沟阵列地形测量,采用连贯扫描干涉测量
Wenyou Qiao1, Zhishan Gao1, Qun Yuan1
1School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China.
本研究介绍了一种使用粒子群优化 (PSO) 的计算方法,用于纠正高比例 (HAR) 结构的连贯扫描干涉测量 (CSI) 中的偏差. 该技术在没有先前数据的情况下准确地测量复杂的混合沟阵列中的地形.
科学领域:
- 光学计量学 在光学计量学
- 纳米技术 纳米技术
- 计算成像技术的成像
背景情况:
- 一致扫描干涉测量 (CSI) 与高比例 (HAR) 样本的误差作斗争,阻碍了微观结构的精确地形测量.
- 使用可变形镜的现有偏差校正方法对于具有不同参数的混合沟阵列中的移位变量偏差是不够的.
研究的目的:
- 开发一种新的计算偏差校正方法,用于使用CSI精确地测量HAR结构的地形.
- 解决先前方法在复杂混合沟阵列中补偿转移变量偏差方面的局限性.
主要方法:
- 建议使用粒子群优化 (PSO) 算法进行计算偏差校正方法,消除了对数据库或先前知识的需求.
- 构建一个空间频域相位波器,以恢复因移变异异常扭曲的干扰信号.
- 基于异平面区域细分的虚拟相过器的多通道偏差校正方案用于混合沟阵列样本.
主要成果:
- 该PSO算法成功地推导出相位波器的最佳Zernike多项式系数,使用干扰边缘对比作为优化标准.
- 从3D传输函数 (3D-TF) 带宽中衍生出的窗口函数用于预处理干涉图,过外部信号.
- 在单个和混合沟样本 (深度100-300微米,宽度10-30微米) 上的实验验证证证了该方法的有效性和准确性.
结论:
- 拟议的计算偏差校正方法准确地测量了HAR结构的地形,即使在具有挑战性的混合沟阵列中.
- 同平面区域细分和基于PSO的虚拟相位过为CSI中移位变量偏差补偿提供了强大的解决方案.
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