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Updated: May 6, 2026

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层氧化对的介电和接口特性,用于纳米级设备应用

Hei Wong1, Weidong Li2, Jieqiong Zhang3

  • 1Department of Electrical Engineering, City University of Hong Kong, Hong Kong, China.

Nanomaterials (Basel, Switzerland)
|July 12, 2025
PubMed
概括

一种新的层氧化物 (La2O3) 介电结构改善了接口特性和电流传导. 这种方法抑制了酸盐的生长,并减少了先进的纳米CMOS和记忆器件的陷密度.

关键词:
这是XPSXPS.门介电器 门介电器接口 接口 接口 接口 接口氨酸 (Lanthanum Aluminate) 是一种酸的化合物.稀土氧化物稀土氧化物

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