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通过计算距离相关系数,对多个环境干扰源对扫描电子显微镜成像的影响进行全面的评估方法

Junhyeok Hwang¹, In-Yong Park², Takashi Ogawa³

¹Strategic Technology Research Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong, Daejeon 34113, Republic of Korea.

Micron (Oxford, England : 1993)

|July 12, 2025

概括

像振动这样的环境干扰可以降低扫描电子显微镜 (SEM) 图像的质量. 本研究介绍了一种使用传感器和频率分析的方法,以识别和减轻这些影响,提高SEM性能和准确性.

科学领域:

材料科学材料科学材料科学
物理物理学物理
工程工程师工程师工程师

背景情况:

扫描电子显微镜 (SEM) 对于纳米级成像至关重要.
环境因素如磁场,声波和机械振动会降低SEM图像质量.
由于相似的图像缺陷,区分这些干扰源具有挑战性.

研究的目的:

开发和评估一种全面的方法来评估环境干扰对SEM成像的影响.
为了能够精确地识别影响SEM性能的主要干扰源.
为减轻环境干扰和增强SEM能力提供见解.

主要方法:

在SEM周围使用多个传感器实时测量10通道信号.
传感器数据的频率分析,包括使用Welch方法的里埃变换.
应用距离相关系数 (DCC) 分析来识别干扰源及其影响.

主要成果:

提出的方法有效地评估和分析环境干扰对SEM成像的影响.
DCC分析成功地识别出主要干扰源,即使是在频率重叠的复杂条件下.
评估方法证明了区分和量化各种环境因素影响的能力.

结论:

这种全面的评估方法有助于识别和减轻影响SEM的环境干扰.
对于具有混合干扰影响的复杂场景,DCC分析尤其有效.
实施这种方法可以提高SEM图像质量和提高测量精度.

关键词:

距离相关系数是距离的相关系数.环境干扰环境干扰环境评估环境评估扫描电子显微镜扫描电子显微镜

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Scanning Electron Microscopy

Scanning Electron Microscopy

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