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Updated: Jun 19, 2026

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization

Published on: July 17, 2015

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在局部固态阶段表皮氧化过程中直接观察粒内缺陷的形成

Manabu Tezura1, Takanori Asano2, Riichiro Takaishi2

  • 1Frontier Technology Research and Development Institute, KIOXIA Corporation, 3-13-1 Moriya-cho, Kanagawa-ku, Yokohama-shi, 221-0022, Kanagawa, Japan. manabu1.tezura@kioxia.com.

Scientific reports
|July 13, 2025
PubMed
概括

没有缺陷的多晶薄膜仍然难以捉摸. 这项研究揭示了结晶过程中异常的原子平面增长,特别是不连续的固相表,会在颗粒内产生缺陷,影响薄膜特性.

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Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope

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Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon

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Imperfections in Crystal Structure: Point, Line and Plane Defects01:25

Imperfections in Crystal Structure: Point, Line and Plane Defects

A perfect crystal, in theory, has a uniform structure with the same unit cell and lattice points throughout. However, any deviation from this periodic arrangement is known as an imperfection or defect. These defects can be categorized into three types: point, line, and plane defects.Point defects occur when there is a deviation from the ideal due to missing atoms, displaced atoms, or additional atoms. These imperfections might occur due to imperfect packing during crystallization or because of...
Imperfections in Crystal Structure: Stoichiometric Point Defects01:26

Imperfections in Crystal Structure: Stoichiometric Point Defects

Schottky defects arise when some lattice points in a crystal, such as those in NaCl, remain unoccupied, creating lattice vacancies without disturbing the overall electrical neutrality of the crystal. This defect is common in ionic crystals where the positive and negative ions are similar in size, as seen in sodium chloride and cesium chloride. The presence of Schottky defects enables the crystal to conduct electricity to a small extent through an ionic mechanism. Electric fields cause nearby...