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Updated: Jun 1, 2026

Atomically Defined Templates for Epitaxial Growth of Complex Oxide Thin Films
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在区域选择性原子层沉积中爆发核化.

Chun Li1,2, Jiaxun Yao2, Jiayi Xu2

  • 1Harbin Institute of Technology, Harbin 150080, China.

ACS applied materials & interfaces
|July 15, 2025
PubMed
概括

我们发现了在区域选择性原子层沉积 (AS-ALD) 中的爆发核化现象,使用的是 perfluoroalkyl 自组装单层 (SAM). 这种方法可以轻松地从非目标区域去除沉积物质,显著提高AS-ALD的选择性.

关键词:
区域选择性的原子层沉积沉积.从底部向上的制造工艺.爆发核化核化的爆发.perfluoroalkyl SAMs 的使用情况自组装的单层单层.

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