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Updated: Sep 15, 2025

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
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Published on: May 28, 2016

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在扫描电子显微镜中检测低能反散电子,使用微通道板检测器检测

Yuto Yanagihara1, Yuanzhao Yao2, Hayata Yamamoto2

  • 1The Graduate School for the Creation of New Photonic Industries, 1955-1 Kurematsucho, Chuo-ku, Hamamatsu, Shizuoka, 431-1202, Japan.

Microscopy (Oxford, England)
|July 16, 2025
PubMed
概括

一个带有能量过器的新型微通道板 (MCP) 探测器可以在扫描电子显微镜 (SEM) 中更好地检测低能电子. 这一进步使得更清晰的低能回散电子 (BSE) 成像成为可能,提高了SEM观测能力.

关键词:
许多CPT的MCP是多元化的.这就是SEM SEM.低能量的BSE是一种低能量的BSE.

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