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Updated: Sep 15, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

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使用MEMS镜像激光差异共焦显微镜对微观尺度表面进行动态3D分析

Qingjiu Chen1, Donghai Yang1, Feifei Wang2

  • 1Department of Mechanical Engineering, City University of Hong Kong, Kowloon Tong, Hong Kong.

Scientific reports
|July 17, 2025
PubMed
概括

这项研究引入了一种新型的高速显微镜,用于实时3D微表面造型. 它使动态表面的纳米级分辨率成像成为可能,克服了以前在速度和精度方面的限制.

关键词:
同焦点显微镜的共聚焦显微镜动态的3D表面造型.有光学3D传感器.扫描MEMS镜子镜子

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