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超分散的3D色彩共聚焦测量

Jiajun Wu^1,2, Jin Yao², An Ren¹

¹State Key Laboratory of Fluid Power and Mechatronic Systems, School of Mechanical Engineering, Zhejiang University, Hangzhou, 310027, China.

Advanced science (Weinheim, Baden-Wurttemberg, Germany)

|July 21, 2025

概括

一种新型的分散金属 (DML) 结合染色共聚焦显微镜实现了高精度的3D测量. 这种方法为高级应用提供亚波长轴分辨率和微米侧分辨率.

科学领域:

光学计量学在光学计量学
纳米光子学纳米光子学
3D重建的3D重建

背景情况:

目前使用元表面的3D重建方法面临着分辨率限制.
现有的视觉测量技术与高精度的3D传感作斗争.

研究的目的:

提出并演示使用分散金属 (DML) 的高精度3D测量方法.
为了克服当前3D重建技术中的分辨率限制.

主要方法:

分散金属 (DML) 与色彩共聚焦方法的整合.
工程分散用于线性响应和衍射有限的聚焦.
通过纵向和横向测量进行实验验证.

主要成果:

实现了±4μm的轴精度和0.325μm的亚波长轴分辨率.
证明横向分辨率超过4.38微米.
成功重建了一个3D USAF-1951分辨率测试图.

结论:

基于DML的色彩共聚焦方法可以实现高精度的3D测量.
这种技术显示了微观结构表征和工业检查的潜力.
为先进的芯片上3D光学计量学铺平了道路.

关键词:

通过3D测量进行3D测量.染色的焦点对应器分散工程是分散的工程.散射金属是一种分散性金属.metasurfaces 是一个地表.

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