Jiamiao Ni1, Naiqi Chen1, Boan Zhong1

  • 1State Key Lab of Metal Matrix Composites, School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, People's Republic of China.

概括

研究人员开发了铜/立方化 (Cu/c-BN) 纳米膜,以改善微电子互连. 这种新材料显著降低了电阻,提高了稳定性,解决了小型化的关键局限性.