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用原子探头断层扫描准备和分析薄被动膜的策略
Elizabeth J Kautz1,2, Kayla H Yano1, Josephine C Hartmann2
1Energy and Environment Directorate, Pacific Northwest National Laboratory, Richland, WA 99352, USA.
概括
原子探头断层扫描 (APT) 现在可以使用一种新的封闭层方法分析薄的被动薄膜. 这种技术改善了合金上的纳米级表面膜的元素映射.
科学领域:
- 材料科学 材料科学 材料科学
- 表面科学是一门学科.
- 分析化学 分析化学
背景情况:
- 原子探头断层扫描 (APT) 提供高分辨率的3D元素和同位素映射,在埋藏的接口中表现出色.
- 分析薄纳米级表面膜,就像合金上的被动膜一样,由于样本准备和数据收集的复杂性,为APT带来了重大挑战.
研究的目的:
- 开发和验证样品制备策略,以可靠地对合金上的薄被动薄膜 (厚度约2-5纳米) 进行APT表征.
- 为了克服在合金被动化过程中形成的纳米级表面薄膜上应用APT的局限性.
主要方法:
- 在APT分析之前,研究的样品制备涉及<100nm封闭层的沉积.
- 对比不同的封闭层材料 (Pt,Ti,Ni/Cr双层) 和沉积方法.
- 利用APT分析二元和多元元素合金上的被动薄膜.
主要成果:
- 一个喷射的Ni/Cr双层覆盖层使整个被动膜的完整表征成为可能.
- 度配置文件清楚地区分了基合金/被动薄膜/盖层接口.
- 证明了以前难以研究的薄被动薄膜的可靠APT分析.
结论:
- 一种新的封闭层策略显著提高了APT分析合金上的薄被动薄膜的能力.
- 喷射的Ni/Cr双层被确定为用于详细的接口和组成分析的有效封闭材料.
- 这种方法为了解纳米级合金被动化机制开辟了新的途径.
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