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SU-8微机加工的WR-4H平面双复合器与双模式共振器
Min Liu1, Qian Yang1, Cheng Guo1
1Department of Information and Communications Engineering, Xi'an Jiaotong University, Xi'an CN710049, Shaanxi, China.
The Review of scientific instruments
|July 24, 2025
概括
本研究介绍了使用SU-8微加工的WR-4带双复合器. 新的双模式共振器设计实现了在170-260 GHz范围内的精确信号分离.
科学领域:
- 电气工程 电气工程
- 微波工程 微波工程
- 特拉赫兹技术的技术.
背景情况:
- 高频电子需要高效的信号过和分离.
- 微加工工艺为紧和精确的元件制造提供了潜力.
研究的目的:
- 使用SU-8微加工设计和制造一个WR-4频段的H平面双复合器.
- 为了在170-260 GHz范围内实现高精度的双频段过.
主要方法:
- 使用SU-8微加工制造双模式共振器结构.
- 设计了一台带有两个第四阶段带通波器和一个非共振接口的双复合器.
- 采用三层制造工艺为两个SU-8芯片.
主要成果:
- 在215-218 GHz和221-224 GHz实现了传输带.
- 在两个通道中,测量回归损失值约为12dB.
- 观测到的中心频率偏移为~1.5 GHz和~1 GHz,分别为较低的和较高的频段.
结论:
- 通过SU-8微加工工艺,可以高精度制造WR-4带复合器.
- 双模式共振器设计有效地将目标频率范围内的信号分开.
- 制造的双机在模拟和测量结果之间显示出良好的一致性.
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