在反射微光谱学中模拟透明基板的部分检测后侧反射
Julian Schwarz1, Jan Dick1, Susanne Beuer2
1Electron Devices, Friedrich-Alexander-Universität Erlangen-Nürnberg, Cauerstraße 6, Erlangen, 91058, Germany.
概括
本研究提出了一种简单的方法来量化背面反射在微光谱测量厚厚的透明基板. 这提高了薄膜特征的准确性,这对于光学过器和光电子设备至关重要.
科学领域:
- 光学工程是指光学工程.
- 材料科学 材料科学 材料科学
- 频谱学是一种光谱学.
背景情况:
- 厚厚的透明基板对于光学过器和光电子设备至关重要.
- 背面反射干扰了这些基板的前面光学表征.
- 精确的光学表征需要考虑背面反射.
研究的目的:
- 开发一种简单的方法来量化微光谱测量中的反向反射率.
- 为了提高在厚透明基板上的薄膜性质确定精度.
- 验证方法与补充测量技术的一致性.
主要方法:
- 使用微图,基板特性和客观镜头放大率进行几何计算.
- 在光学测量中纳入数值光圈效应.
- 将开发的方法与忽略或完全包含背面反射的模型进行比较.
主要成果:
- 开发的方法可靠地评估各种基板,厚度和客观镜头的背面反射.
- 显著减少了测量和模型之间的平均平方误差,用于部分检测到的背面反射.
- 精确确定玻璃基板上的化和化/氧化层厚度.
结论:
- 拟议的方法提供了一种可靠的方法来量化微光谱中的反向反射.
- 这种技术提高了在厚厚的透明基板上薄膜分析的准确性.
- 这种方法与扫描传输电子显微镜/能量散射X射线光谱 (STEM/EDX) 进行层厚度测定是一致的.
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