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工程高Q超导微波共平面波导共振器用于紧的连贯量子电路
Shima Poorgholam-Khanjari1, Valentino Seferai1, Paniz Foshat1
1Electronics and Nanoscale Engineering Division, James Watt School of Engineering, University of Glasgow, Glasgow, UK.
Scientific reports
|July 27, 2025
概括
(Ta) 超导共振器是为量子电路设计的. 厚度依赖的制造实现了高质量因子和运动感应,这对于紧,高保真量子计算应用至关重要.
科学领域:
- 量子计算是一种量子计算.
- 材料科学 材料科学 材料科学
- 微波工程 微波工程
背景情况:
- (Ta) 是超导量子电路的一个有希望的材料,因为它的微波损耗低,高动力感应率和CMOS兼容性.
- 现有的Ta共振器在制造过程中经常需要基板加热,这限制了集成的可能性.
研究的目的:
- 为了展示厚度依赖,高质量因子 (高Q) 超导微波共平面波导共振器的制造工程.
- 优化膜的特性,以提高量子计算应用中的性能.
主要方法:
- 膜在室温下沉积在基板上,使用种子层促进所需的晶体结构.
- 膜的厚度被改变,以设计动感应力 (Ls) 和质量因子 (Q).
- 微波性能,包括内部质量因子 (Qi) 和运动感应,在不同的厚度中进行了表征.
主要成果:
- 实现的最大内部质量系数 (Qi) 为3.6 × 10^6在高功率模式下,为4.5 × 10^5在单光子模式下,用于100纳米Ta片.
- 最高的0.6pH/sq的动感感应率 (Ls) 获得了最薄的薄膜 (40nm).
- 这些结果代表了与以前的室温沉积电共振器相比的改进.
结论:
- 共振器的室温制造与种子层使高Q和高Ls成为可能.
- 工程微波电路在紧的量子计算应用中提供了高保真性操作的巨大潜力.
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