Run-Xin Song1, Dong Wang2, Yiqiao Yang3

  • 1Key Laboratory for Anisotropy and Texture of Materials (Ministry of Education), School of Material Science and Engineering, Northeastern University, Shenyang 110819, China.

PubMed
概括

本综述详细介绍了合金喷目标,这对于电子产品至关重要. 它通过热力学处理探索微结构控制,以提高高级应用的薄膜沉积质量.