基于PZT机电合效应的工作平台的平面化方法

Aiqun Xu1, Jianhui Yuan1, Jinxuan Gao1

  • 1School of Intelligent Manufacturing and Energy Engineering, Zhejiang University of Science and Technology, 318 Liu He Road, Hangzhou 310023, China.

Micromachines
|July 30, 2025
PubMed
概括

这项研究引入了一种使用硫酸 (PZT) 压电陶用于精确微电子机械应用的新型平面化方法. 基于PZT的系统显著减少了平台倾斜,提高了航空航天和机器人等领域的精度.

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