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Updated: Sep 13, 2025

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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在半球共振器陀螺仪中读出电路的比较噪声分析

Zhihao Yu1,2, Libin Zeng1, Changda Xing1

  • 1College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha 410073, China.

Micromachines
|July 30, 2025
PubMed
概括

对于高精度半球共振陀螺仪 (HRG) 系统,电荷敏感放大器 (CSA) 与传 impedance 放大器 (TIA) 相比,显著降低了读出电路噪声. 这导致了更好的共振器位移检测和适合要求高的应用.

关键词:
电荷敏感放大器 (CSA) 是一个半球共振器陀螺仪 (HRG) 半球共振器陀螺仪通过阻抗放大器 (TIA)电路带宽 电路带宽噪声特征 噪声特征

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