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Updated: Jun 19, 2026

A Novel Method for In Situ Electromechanical Characterization of Nanoscale Specimens
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A Novel Method for In Situ Electromechanical Characterization of Nanoscale Specimens

Published on: June 2, 2017

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用于测量3D芯片集成的透过通道中的残留氧化物的反光度法

Joachim Bauer, Friedhelm Heinrich, Francesco Villasmunta

    Optics express
    |July 30, 2025
    PubMed
    概括

    本研究介绍了一种快速,非破坏性的光学方法,用于测量3D芯片结构. 该技术通过深度和晶圆厚度准确量化透过,帮助半导体制造.

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    3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

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    In Vitro Multiparametric Cellular Analysis by Micro Organic Charge-modulated Field-effect Transistor Arrays10:05

    In Vitro Multiparametric Cellular Analysis by Micro Organic Charge-modulated Field-effect Transistor Arrays

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    相关概念视频

    Total Internal Reflection Fluorescence Microscopy01:05

    Total Internal Reflection Fluorescence Microscopy

    Total internal reflection fluorescence microscopy or TIRF is an advanced microscopic technique used to visualize fluorophores in samples close to a solid surface with a higher refractive index, such as a glass coverslip. TIRF only allows fluorophores in proximity to the solid surface to be excited. When light from a medium with a lower refractive index (such as air) hits the glass coverslip at a critical angle, the light undergoes total internal reflection stead of passing through the glass.