通过对阴影蒸发偏差进行校正,提高了多兰 - 约瑟夫森桥交叉点的晶圆尺度统一性
Daria A Moskaleva1,2, Nikita D Korshakov1, Dmitry O Moskalev1
1Shukhov Labs, Bauman Moscow State Technical University, Quantum Park, Moscow, 105005, Russia.
Scientific reports
|August 1, 2025
概括
超导量子处理器的制造通过新的约瑟夫森连接工艺得到了改进. 这种强大的晶圆尺度方法提高了可重现性,并减少了量子比特频率碰撞,以提高量子计算性能.
科学领域:
- 固态量子计算的固态量子计算
- 超导电路中的超导电路.
- 材料科学是一种材料科学.
背景情况:
- 超导量子处理器面临由于量子比特制造变化的局限性,导致共振频率碰撞.
- 对于约瑟夫森交点 (JJs) 的多兰-桥影蒸发过程表现出低的可重现性,影响量子比特性能.
- 对JJ关键维度的精确控制对于可扩展的量子计算至关重要.
研究的目的:
- 为Al/AlOx/Al Josephson连接器开发一个强大的晶圆尺度制造工艺.
- 提高JJ关键尺寸的可复制性,减少面积变化.
- 为了优化JJ氧化过程,以提高室温抵抗的均性.
主要方法:
- 实施对双层抗阻面罩偏差的拓校正模型,考虑蒸发源几何.
- 优化JJ氧化过程,包括方法,压力和时间.
- 在4英寸晶圆上应用阴影蒸发偏差校正和氧化最佳实践.
主要成果:
- 在49厘米2的晶圆面积上,在高达130×670nm2的关键尺寸下,实现了约瑟夫森交点面积变化系数 (σ(S) /S) 降至1.1%.
- 在不同的晶圆工作面积 (49,25,16厘米2) 中,对各种JJ面积 (0.025微米2和0.090微米2) 的σ (S) /S显著改善.
- 报告称,0.025 μm2 JJ面积的可复制性降至4.1%,0.090 μm2 JJ面积降至2.3%.
结论:
- 开发的晶圆尺度JJ工艺,结合拓校正和优化氧化,显著提高了制造的可重复性.
- 这种方法解决了超导量子处理器制造中的关键局限性,为更强大,更可扩展的设备铺平了道路.
- 拟议的制造方法对于晶圆尺度超导量子计算的进步至关重要.
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